Marca: Park, Modelo: NX10
XY Scanner
Single module flexure XY-scanner with closed-loop control
50 µm × 50 µm (optional 10 µm × 10 µm or 100 µm × 100 µm)
Resolution : 0.05 nm
Position detector noise : < 0.25 nm (bandwidth: 1 kHz)
Out-of-plane motion : < 2 nm (over 40 µm scan
Motorized Stage
Sample size : up to 50 mm x 50 mm, up to 20 mm thickness
Sample weight : up to 500 g
XY stage travel : 20 mm x 20 mm
Z stage travel : 22 mm
Focus stage travel : 15 mm
Z Scanner range
Guided high-force flexure scanner
Scan range : 15 µm (optional 30 µm)
Resolution : 0.015 nm
Position detector noise : 0.03 nm (bandwidth: 1 kHz)
Resonant frequency : > 9 kHz (typically 10.5 kHz)
Vision
10x (0.21NA) ultra-long working distance lens (1µm resolution)
20x (0.42 NA) high-resolution, long working distance lens (0.6 µm resolution)
Direct on-axis vision of sample surface and cantilever
Field-of-view : 480 × 360 µm (with 10× objective lens)
CCD : 1 Mpixel (pixel resolution: 0.4 µm)
Software
SmartScan™
Dedicated system control and data acquisition software
Adjusting feedback parameters in real time
Script-level control through external programs(optional)
XEI
AFM data analysis software
Electronics
Signal processing
ADC : 18 channels
4 high-speed ADC channels (64 MSPS)
24-bit ADCs for X, Y, and Z scanner position sensor
DAC : 12 channels
2 high-speed DAC channels (64 MSPS)
20-bit DACs for X, Y, and Z scanner positioning
Maximum data size : 4096 x 4096 pixels
Integrated functions
3 channels of flexible digital lock-in amplifier
Spring constant calibration (Thermal method, optional)
Digital Q control
External signal access
20 embedded signal input/output ports
5 TTL outputs : EOF, EOL, EOP, Modulation, and AC bias